Description
PRELIMINARY PRELIMINARY Single Axis Resonant Bonded MEMS Mirrors Datasheet A9RB Series: A9RB.1-1600, A9RB.1-2000, A9RB.1-2400 OVERVIEW Mirrorcle T.
Features
* Single-axis Resonant Bonded MEMS Mirror 1.6mm to 2.4mm diameter mirrors Optically flat, Aluminum or Gold coated ±8.5° Mechanical (Resonant Only) Rotation Electro-static Actuation Ultra-low power consumption High robustness and reliability Wide operating temperature range Window opt
Applications
* with widely different specifications, we provide many types of gimballess two-axis actuator designs. Single-axis devices are in some cases based on dual-axis devices with only the X-axis activated in assembly. However single-axis resonant devices are a specialized category with very stiff small actu