Datasheet Details
Part number:
A9RB.1-2000, A9RB.1-1600
Manufacturer:
Mirrorcle
File Size:
872.01 KB
Description:
Single axis resonant bonded mems mirrors.
Note:
This datasheet PDF includes multiple part numbers: A9RB.1-2000, A9RB.1-1600.
Please refer to the document for exact specifications by model.
A9RB.1-2000, A9RB.1-1600, Single Axis Resonant Bonded MEMS Mirrors
PRELIMINARY PRELIMINARY Single Axis Resonant Bonded MEMS Mirrors Datasheet A9RB Series: A9RB.1-1600, A9RB.1-2000, A9RB.1-2400 OVERVIEW Mirrorcle Technologies Single-Axis Resonant Bonded MEMS Mirrors are based on proprietary fabrication technology.
They provide fast optical beam steering, while requiring ultra-low power.
The mirrors deflect laser beams or images to optical scanning angles of up to ±18°.
Compared to large-scale galvanometer-based optical scanners, these devices require several
A9RB.1-2000 Features
* Single-axis Resonant Bonded MEMS Mirror 1.6mm to 2.4mm diameter mirrors Optically flat, Aluminum or Gold coated ±8.5° Mechanical (Resonant Only) Rotation Electro-static Actuation Ultra-low power consumption High robustness and reliability Wide operating temperature range Window opt
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