TQPHT Datasheet (TriQuint Semiconductor)

TQPHT, pHEMT Foundry Service

TriQuint’s 0.5 µm pHEMT process is based on our production released 0.25 µm gate process.

TQPHT substitutes lower cost optical lithography in place of e-beam and adds TriQuint’s unique thick metal scheme.

This process is targeted for high efficiency and linearity in power amplifiers, low noise ampli

TQPHT Features

* Metal 2 Dielectric Metal 1 Dielectric MIM Metal Metal 2 - 4um Dielectric Metal 1 - 2um

* Metal 1 NiCr Isolation Implant Isolation Implant Nitride N+ Pseudomorphic Channel Metal 0 pHEMT MIM Capacitor Semi-Insulating GaAs Substrate NiCr Resistor